國家衛生研究院 NHRI:Item 3990099045/7580
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    题名: Application of TEM for distinguishing the primary and secondary abrasives of undiluted CMP slurry
    作者: Sun, CJ;Tai, LA;Sharma, P;Ko, YF;Chen, YC;Chu, CH;Hsieh, YF;Yang, CS;Yew, TR
    贡献者: Center for Nanomedicine Research
    摘要: Determination of morphology and size distribution of primary and secondary abrasives of slurry is essential for optimization of CMP performance. The undiluted slurry was characterized in liquid phase using silicon based Nano-pipettes in TEM. To validate utility of Nano-pipettes, comparatively quantitative analysis was performed by cryo-TEM technique.
    日期: 2013-07
    關聯: 20th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits. 2013 Jul:400-403.
    Link to: http://dx.doi.org/10.1109/ipfa.2013.6599189
    Cited Times(WOS): https://www.webofscience.com/wos/woscc/full-record/WOS:000329045700073
    Cited Times(Scopus): http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=84885625665
    显示于类别:[楊重熙] 會議論文/會議摘要

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